Fast white-light interferometry with Hilbert transform evaluation

Pavel Pavliček; Erik Mikeska

doi:10.1117/12.2261951

23 December 2016 Fast white-light interferometry with Hilbert transform evaluation

Pavel Pavliček, Erik Mikeska

Proceedings Volume 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 101420Y (2016) https://doi.org/10.1117/12.2261951
Event: 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2016, Jasna, Slovakia

Abstract

White-light interferometry is an established method for the measurement of the shape of objects. Unlike to the classical interferometry, white-light interferometry can measure the shape of objects with rough surface. A major disadvantage of white-light interferometry is the low scanning speed and thus the long measurement time. This disadvantage can be overcome by a strong undersampling and Hilbert transform evaluation. We propose a system that measures the shape of objects with rough surface with the scanning speed of more than 100 μm/s with the standard frame rate of 25 fps. The measurement uncertainty is comparable with that obtained with standard design.

Citation Download Citation

Pavel Pavliček and Erik Mikeska "Fast white-light interferometry with Hilbert transform evaluation", Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 101420Y (23 December 2016); https://doi.org/10.1117/12.2261951

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