Effect of oxygen flux on stress and optical properties of  Ta-2 O-5 using ion-beam sputtering

Qi Yu; Jun-qi Fan; Chun-lin Guan

doi:10.1117/12.2267493

8 March 2017 Effect of oxygen flux on stress and optical properties of Ta₂O₅ using ion-beam sputtering

Qi Yu, Jun-qi Fan, Chun-lin Guan

Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 102551E (2017) https://doi.org/10.1117/12.2267493
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China

Abstract

The ion-beam sputtering deposition is a good technique for making low scattering coatings. In this work, the Ta₂O₅ thin films as the oxygen flux (15-35sccm) were prepared on the K9 glass using the single ion-beam sputtering. As the oxygen flux increased, the thickness of films with the same deposited time decreased from 936.67nm to 837.87nm. The refractive index was 2.075 in 1000nm at 30 sccm. The stress increased along with the increasing of oxygen flux. In the work, the compressive stress increased from 319.55 Mpa to 410.92 Mpa.

Citation Download Citation

Qi Yu, Jun-qi Fan, and Chun-lin Guan "Effect of oxygen flux on stress and optical properties of Ta₂O₅ using ion-beam sputtering", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102551E (8 March 2017); https://doi.org/10.1117/12.2267493

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available