Reactive atom plasma (RAP) process for fabricating damage-free SiC optics

Yogesh Verma; Peter S. Fiske; George J. Gardopee

doi:10.1117/12.718721

14 May 2007 Reactive Atom Plasma (RAP^TM) process for fabricating damage-free SiC optics

Yogesh Verma, Peter S. Fiske, George J. Gardopee

Proceedings Volume 10316, Optifab 2007: Technical Digest; 103160B (2007) https://doi.org/10.1117/12.718721
Event: Optifab 2007, 2007, Rochester, New York, United States

Abstract

Conventional mechanical grinding and lapping processes impart substantial sub-surface damage (SSD) in optical substrates. SSD is usually mitigated by subsequent grinding and lapping with progressively smaller grit size which removes the damage from the previous step but leaves behind SSD damage of its own. The last remnants of SSD are removed in the final polishing step, which ends up being the longest process step. For some high laser fluence glass optics, BOE etch is used as an intermediate step between the grinding steps in order to arrest further propagation of SSD. No such easily implemented wet-etch chemistry exists for silicon carbide (SiC) optics. Reactive Atom Plasma (RAP^TM, a novel non-contact, atmospheric pressure plasma based process, has been shown to reveal and mitigate sub-surface damage in optical materials. Twyman stress tests on milled SiC substrates demonstrate RAP's ability to mitigate this stress. We will show how the RAP process can enhance and accelerate the fabrication of SiC optics.

Citation Download Citation

Yogesh Verma, Peter S. Fiske, and George J. Gardopee "Reactive Atom Plasma (RAP^TM) process for fabricating damage-free SiC optics", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160B (14 May 2007); https://doi.org/10.1117/12.718721

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available