Compensation of vibration errors in high-performance interferometry

Leslie L. Deck

doi:10.1117/12.719429

14 May 2007 Compensation of vibration errors in high-performance interferometry

Leslie L. Deck

Proceedings Volume 10316, Optifab 2007: Technical Digest; 103160V (2007) https://doi.org/10.1117/12.719429
Event: Optifab 2007, 2007, Rochester, New York, United States

Abstract

Here I describe results of a method for reducing the influence of vibrations in PSI using the spatial information in the interference intensity images to achieve as much as 100X reduction in induced surface distortion for small-amplitude vibrations. The interference patterns are first normalized for the distribution in illumination across the field of view by measuring the empty-cavity intensity distribution of light reflected from the reference surface prior to measuring the object. The technique then determines the phase increments between acquired frames by comparing the measured interference intensity patterns, and then uses these increments to recalculate a vibration-corrected profile. This approach does not require spatial carrier fringes and maintains full lateral sampling resolution. The method can be applied to any PSI acquisition, and is compatible with most surface shapes encountered in optical testing, including flats, spheres and mild aspheres. Unlike carrier-fringe techniques, as few as one or two interference fringes are sufficient for calculating the phase increments.

Citation Download Citation

Leslie L. Deck "Compensation of vibration errors in high-performance interferometry", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160V (14 May 2007); https://doi.org/10.1117/12.719429

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
2 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Interferometry

Error analysis

Phase shifts

Distortion

Optical testing

Spatial resolution

Aspheric lenses

Show All Keywords

Keywords/Phrases

Search In:

Publication Years