Software tools for studying optical manufacturability with modern monochromatic monitoring devices

Alexander Tikhonravov; Michael Trubetskov; Jennifer Kruschwitz; Alfons Zoller; Harro Hagedorn; Boris Romanov; Michael Boos

doi:10.1117/12.718119

14 May 2007 Software tools for studying optical coating manufacturability with modern monochromatic monitoring devices

Alexander Tikhonravov, Michael Trubetskov, Jennifer Kruschwitz, Alfons Zoller, Harro Hagedorn, Boris Romanov, Michael Boos

Author Affiliations +

Proceedings Volume 10316, Optifab 2007: Technical Digest; 103161K (2007) https://doi.org/10.1117/12.718119
Event: Optifab 2007, 2007, Rochester, New York, United States

Abstract

The success of fabrication of optical coatings depends on a proper choice of a theoretical coating design and on the choice of monitoring strategy that provides low thickness errors for the chosen design. Software tools described in this presentation help an optical coating engineer to investigate a potential manufacturability of a given theoretical design when various monochromatic monitoring strategies are applied. This may help to reduce or even eliminate test deposition runs required for a successful coating fabrication.

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Alexander Tikhonravov, Michael Trubetskov, Jennifer Kruschwitz, Alfons Zoller, Harro Hagedorn, Boris Romanov, and Michael Boos "Software tools for studying optical coating manufacturability with modern monochromatic monitoring devices", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103161K (14 May 2007); https://doi.org/10.1117/12.718119

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