Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement

Ju-Yi Lee; Hung-Lin Hsieh; Zhi Ying Lin

doi:10.1117/12.2270100

26 June 2017 Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement

Ju-Yi Lee, Hung-Lin Hsieh, Zhi Ying Lin

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103293S (2017) https://doi.org/10.1117/12.2270100
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

In this study, a heterodyne grating interferometer based on the sinusoidal phase modulation method for displacement measurements was proposed. The interference beams were modulated using a sinusoidal oscillating grating, and the proposed frequency-domain quadrature detection method was used to detect the optical phase of the interferometer and determine the displacement. Experimental results were consistent with the strain gauge results for several displacement ranges. When only high-frequency noise was considered, our method achieved a measurement resolution of approximately 2 nm.

Citation Download Citation

Ju-Yi Lee, Hung-Lin Hsieh, and Zhi Ying Lin "Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293S (26 June 2017); https://doi.org/10.1117/12.2270100

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