Revealing features of different optical shaping technologies by a point diffraction interferometer

Nikolay Voznesenskiy; Mariia Voznesenskaia; Diwaker Jha; Heidi Ottevaere; Małgorzata Kujawińska; Maciej Trusiak; Kamil Liżewski

doi:10.1117/12.2270116

26 June 2017 Revealing features of different optical shaping technologies by a point diffraction interferometer

Nikolay Voznesenskiy, Mariia Voznesenskaia, Diwaker Jha, Heidi Ottevaere, Małgorzata Kujawińska, Maciej Trusiak, Kamil Liżewski

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Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103293X (2017) https://doi.org/10.1117/12.2270116
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

Almost hidden residual defects of a test surface can be revealed using high precision instrument such as a point diffraction interferometer (PDI). In general, PDI is engaged to display the figure of a surface or wavefront with subnanometer accuracy paying attention to low-frequency configurations. Such technique is suited to test EUV or X-ray optics. The tool described in the paper is able to map absolute profile deviations of several angstroms and therefore it provides a new vision of a surface under test of various quality, e.g. detects specific characteristics which immediately disclose either lapping or diamond turning has been used to form the substrate. Such inspection may help optimize the processes in early stage of shape forming before final configuring.

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Nikolay Voznesenskiy, Mariia Voznesenskaia, Diwaker Jha, Heidi Ottevaere, Małgorzata Kujawińska, Maciej Trusiak, and Kamil Liżewski "Revealing features of different optical shaping technologies by a point diffraction interferometer", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293X (26 June 2017); https://doi.org/10.1117/12.2270116

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