Paper
7 September 2017 Single-grating Talbot imaging for wavefront sensing and x-ray metrology
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Abstract
Single-grating Talbot imaging relies on high-spatial-resolution detectors to perform accurate measurements of X-ray beam wavefronts. The wavefront can be retrieved with a single image, and a typical measurement and data analysis can be performed in few seconds. These qualities make it an ideal tool for synchrotron beamline diagnostics and in-situ metrology. The wavefront measurement can be used both to obtain a phase contrast image of an object and to characterize an X-ray beam. In this work, we explore the concept in two cases: at-wavelength metrology of 2D parabolic beryllium lenses and a wavefront sensor using a diamond crystal beam splitter.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Walan Grizolli, Xianbo Shi, Tomasz Kolodziej, Yuri Shvyd'ko, and Lahsen Assoufid "Single-grating Talbot imaging for wavefront sensing and x-ray metrology", Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 1038502 (7 September 2017); https://doi.org/10.1117/12.2274023
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Cited by 5 scholarly publications.
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KEYWORDS
Metrology

X-rays

Interferometry

Wavefront sensors

Wavefronts

Interferometers

Near field

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