Single-shot RGB polarising interferometer

H. Muhamedsalih; S. Al-Bashir; F. Gao; X. Jiang

doi:10.1117/12.2507354

18 August 2018 Single-shot RGB polarising interferometer

H. Muhamedsalih, S. Al-Bashir, F. Gao, X. Jiang

Proceedings Volume 10749, Interferometry XIX; 1074909 (2018) https://doi.org/10.1117/12.2507354
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).

Conference Presentation

Citation Download Citation

H. Muhamedsalih, S. Al-Bashir, F. Gao, and X. Jiang "Single-shot RGB polarising interferometer", Proc. SPIE 10749, Interferometry XIX, 1074909 (18 August 2018); https://doi.org/10.1117/12.2507354

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