Spatio-temporal sampling of the coherence function for step height measurements

Claas Falldorf; Andreas Hyra; Aleksander Simic; Ralf B. Bergmann

doi:10.1117/12.2321145

27 September 2018 Spatio-temporal sampling of the coherence function for step height measurements

Claas Falldorf, Andreas Hyra, Aleksander Simic, Ralf B. Bergmann

Proceedings Volume 10749, Interferometry XIX; 107490Y (2018) https://doi.org/10.1117/12.2321145
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

We present a method for shape measurements, which is based on sampling the temporal coherence function of the light using a shear interferometer. In contrast to standard White Light Interferometry our method has low demands regarding the spatial coherence of the light and is robust with respect to exterior disturbances. We sample the coherency function of the light with the help of of a test object with steps of a couple of micrometers. Due to its common path principle the system is intrinsically vibration tolerant.

Conference Presentation

Citation Download Citation

Claas Falldorf, Andreas Hyra, Aleksander Simic, and Ralf B. Bergmann "Spatio-temporal sampling of the coherence function for step height measurements", Proc. SPIE 10749, Interferometry XIX, 107490Y (27 September 2018); https://doi.org/10.1117/12.2321145

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