Design and demonstration of tunable soft x-ray lateral shearing and Hartmann wavefront sensors

Antoine Wojdyla; Diane Bryant; Weilun Chao; Lahsen Assoufid; Daniele Cocco; Mourad Idir; Kenneth A. Goldberg

doi:10.1117/12.2321642

17 September 2018 Design and demonstration of tunable soft x-ray lateral shearing and Hartmann wavefront sensors

Antoine Wojdyla, Diane Bryant, Weilun Chao, Lahsen Assoufid, Daniele Cocco, Mourad Idir, Kenneth A. Goldberg

Proceedings Volume 10760, Advances in X-Ray/EUV Optics and Components XIII; 1076003 (2018) https://doi.org/10.1117/12.2321642
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

We describe design guidelines for soft x-ray wavefront sensors and experimentally demonstrate their performance, comparing grating-based lateral shearing interferometry and Hartmann wavefront sensing. We created a compact shearing interferometer concept with a dense array of binary amplitude gratings in a single membrane to support one-dimensional wavefront measurements across a wide wavelength range without the need for longitudinal position adjustment. We find that a common scaling parameter based on wavelength and the distance to the measurement plane guides the design of both systems toward optimal sensitivity. We show preliminary results from recent experiments demonstrating one and two-dimensional wavefront sensing below the Marechal criterion.

Conference Presentation

Citation Download Citation

Antoine Wojdyla, Diane Bryant, Weilun Chao, Lahsen Assoufid, Daniele Cocco, Mourad Idir, and Kenneth A. Goldberg "Design and demonstration of tunable soft x-ray lateral shearing and Hartmann wavefront sensors", Proc. SPIE 10760, Advances in X-Ray/EUV Optics and Components XIII, 1076003 (17 September 2018); https://doi.org/10.1117/12.2321642

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available