Paper
17 September 2018 Design and realization of a grazing-incidence plane-grating monochromator
N. Fabris, F. Frassetto, P. Miotti, C. Spezzani, L. Poletto
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Abstract
The design and realization of a plane-grating monochromator mainly intended for high-energy resolution in the extreme-ultraviolet and soft-X-ray spectral regions is presented. The principal application is the spectral selection of high-order laser harmonics generated in gas combined with the possibility to achieve sub-20-meV bandwidth, approaching synchrotron-like beamlines resolution performances. This geometry has three optical elements: a uniform-line-spaced plane grating illuminated by the converging light coming from a focusing cylindrical mirror and an additional plane mirror that is needed to change the grating subtended angle to keep the system in focus on a fixed slit. The parameters of the focusing mirror are determined to introduce a coma that compensates for the coma given by the grating. A monochromator for the 12-50 eV region has been realized to show the feasibility and the performances of the configuration.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. Fabris, F. Frassetto, P. Miotti, C. Spezzani, and L. Poletto "Design and realization of a grazing-incidence plane-grating monochromator", Proc. SPIE 10760, Advances in X-Ray/EUV Optics and Components XIII, 1076009 (17 September 2018); https://doi.org/10.1117/12.2319691
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KEYWORDS
Mirrors

Monochromators

Monochromatic aberrations

Extreme ultraviolet

Spectral resolution

Optical components

Diffraction gratings

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