Annealing effects on the structural and optical properties of HfO2 thin films deposited by thermal evaporation technique

Shida Li; Xiaoli Liu; Huasong Liu; Lishuan Wang; Yugang Jiang; Peng Shang; Xiao Yang; Dandan Liu; Yiqin Ji

doi:10.1117/12.2506510

16 January 2019 Annealing effects on the structural and optical properties of HfO₂ thin films deposited by thermal evaporation technique

Shida Li, Xiaoli Liu , Huasong Liu , Lishuan Wang, Yugang Jiang , Peng Shang, Xiao Yang , Dandan Liu , Yiqin Ji

Author Affiliations +

Proceedings Volume 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 108381L (2019) https://doi.org/10.1117/12.2506510
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Hafnium oxide (HfO₂) thin films has been prepared on glass substrates at room temperature by thermal evaporation technique using HfO₂ powders (99% purity) and then are annealed at different temperatures ranging from 150° to 450° for 24 hours in air. The effects of the annealing temperatures on the structural and optical properties of the HfO₂ thin films were studied. Amorphous structures of the HfO₂ films were researched by XRD technology. The results of the study show that the state of the HfO₂ film changes from amorphous to polycrystalline with the increase of heat treatment temperature and the the stress is released. Besides, the refractive index of the films decreases and the band energy changes significantly. Therefore, the heat treatment can effectively change the film properties and it is necessary to comprehensively select the optimal heat treatment temperature according to the specific application of the HfO₂ thin films.

Citation Download Citation

Shida Li, Xiaoli Liu , Huasong Liu , Lishuan Wang, Yugang Jiang , Peng Shang, Xiao Yang , Dandan Liu , and Yiqin Ji "Annealing effects on the structural and optical properties of HfO₂ thin films deposited by thermal evaporation technique", Proc. SPIE 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 108381L (16 January 2019); https://doi.org/10.1117/12.2506510

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available