Study on damage of CaF2 windows irradiated by 248nm ultraviolet excimer laser

Xi Wang; Yue Hu; Jiacheng Wu; Xin Li; Jingzhen Shao

doi:10.1117/12.2536378

8 July 2019 Study on damage of CaF₂ windows irradiated by 248nm ultraviolet excimer laser

Xi Wang, Yue Hu, Jiacheng Wu, Xin Li, Jingzhen Shao

Proceedings Volume 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers; 110630I (2019) https://doi.org/10.1117/12.2536378
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

It has very important application value to investigate the damage mechanism of CaF₂ windows irradiated by ultraviolet excimer laser. As significant optical materials, CaF₂ windows have been widely used in the ultraviolet photoelectrical field. Because the ultraviolet excimer laser presents favorable characteristics such as short wavelength and high photon energy, the high power excimer lasers are expected to be widely applied in precision laser machining and military field. In this paper, the experiment on damage in CaF₂ windows irradiated by 248nm ultraviolet excimer laser was carried out. The damage characteristics of irradiated spots under different experiment conditions were detected by optical microscope. The laser induced damage thresholds of CaF₂ windows were calculated by the zero damage probability through linear fitting. The damage mechanism of CaF₂ windows were discussed based on the surface characteristics of damage spots. The experimental results indicated that the damage thresholds of zero probability for the 248nm excimer laser to CaF₂ windows were 5.6J/cm² of the incident surface, and 1.1J/cm² of the exit surface respectively. When CaF₂ windows was irradiated by 248nm excimer laser, its damage first occurred to its exit surface, the damage threshold of exit surface was smaller than that of incident surface. As the laser fluence increased gradually, the damage of exit surface was shown to grow exponential and its degree was significantly higher than that of incident surface. This work is helpful to further improve damage resistance of CaF₂ windows in high power laser facility. It can provide the necessary references for selection of ultraviolet optical materials and optimization of application.

Citation Download Citation

Xi Wang, Yue Hu, Jiacheng Wu, Xin Li, and Jingzhen Shao "Study on damage of CaF₂ windows irradiated by 248nm ultraviolet excimer laser", Proc. SPIE 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers, 110630I (8 July 2019); https://doi.org/10.1117/12.2536378

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KEYWORDS

Excimer lasers

Ultraviolet radiation

Laser damage threshold

Silica

Laser energy

Laser induced damage

High power lasers

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