Laser damage characteristics of indium-tin-oxide film and polyimide film irradiated by 1064nm high power lasers

Xiaofeng Liu; Liping Peng; Xi Wang; Xiaoshuang Wang; Dawei Li; Yuanan Zhao; Jianda Shao

doi:10.1117/12.2536330

20 November 2019 Laser damage characteristics of indium-tin-oxide film and polyimide film irradiated by 1064nm high power lasers

Xiaofeng Liu, Liping Peng, Xi Wang, Xiaoshuang Wang, Dawei Li, Yuanan Zhao, Jianda Shao

Author Affiliations +

Proceedings Volume 11173, Laser-induced Damage in Optical Materials 2019; 111731B (2019) https://doi.org/10.1117/12.2536330
Event: SPIE Laser Damage, 2019, Broomfield (Boulder area), Colorado, United States

Abstract

The damage characteristics of the indium-tin-oxide (ITO) layer and the polyimide (PI) layer, which are two constituent components of a LCD, induced by a high-peak-power laser and a high-average-power laser are investigated. The PI alignment layer is pinned on the ITO film to imitate the structure of the LCD as much as possible in our study. Under the irradiation of the high-peak-power laser, the damage process of the PI/ITO/SUB sample involves thermally induced plastic deformation, followed by cooling when the irradiation fluence is near the LIDT, and rupture when the irradiation fluence is higher. High-average-power laser irradiation results in damaged morphologies of the bulge for the PI/ITO/SUB sample. The temperature distributions induced by the pulsed laser and the high-repetition-rate laser are investigated. The damage is attributed to the intrinsic heat absorption of the ITO films. Under the irritation of the high-peak-power laser, the temperature rises rapidly to a high degree at very short time because of the instant strong absorption in ITO layer, and resulted in vaporization of ITO layer consequently. Subsequently, the vaporized ITO breaks through the surface PI and develops the visible damage. However, under the irritation of high-average-power laser, ITO layer absorbs laser energy, resulting in a slow temperature rise and a small temperature gradient.

Conference Presentation

Citation Download Citation

Xiaofeng Liu, Liping Peng, Xi Wang, Xiaoshuang Wang, Dawei Li, Yuanan Zhao, and Jianda Shao "Laser damage characteristics of indium-tin-oxide film and polyimide film irradiated by 1064nm high power lasers", Proc. SPIE 11173, Laser-induced Damage in Optical Materials 2019, 111731B (20 November 2019); https://doi.org/10.1117/12.2536330

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available