Suspended InGaAs membrane waveguide devices with subwavelength gratings and photonic crystal structures for ammonia sensing at lambda=6.15um (Conference Presentation)

Kyoung Min Yoo; Jason Midkiff; Ali Rostamian; Hamed Dalir; Ray T. Chen

doi:10.1117/12.2546430

10 March 2020 Suspended InGaAs membrane waveguide devices with subwavelength gratings and photonic crystal structures for ammonia sensing at λ=6.15μm (Conference Presentation)

Kyoung Min Yoo, Jason Midkiff, Ali Rostamian, Hamed Dalir, Ray T. Chen

Author Affiliations +

Proceedings Volume 11276, Optical Components and Materials XVII; 1127610 (2020) https://doi.org/10.1117/12.2546430
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

Fully suspended InGaAs waveguide devices with holey photonic crystal waveguides (HPCWs) and Sub-wavelength waveguides (SWWs) are designed and fabricated for mid-infrared sensing at λ=6.15µm in the low index contrast InGaAs-InP platform. We experimentally detect 5 ppm ammonia in 1 mm long suspended HPCW and 3 mm long suspended SWW with propagation loss of 39.1 dB/cm and 4.1 dB/cm, respectively. This result emphasizes the advantage of SWWs which can utilize the longer devices by virtue of its low propagation loss to increase the gas sensing sensitivity compare to HPCWs.

Conference Presentation

Citation Download Citation

Kyoung Min Yoo, Jason Midkiff, Ali Rostamian, Hamed Dalir, and Ray T. Chen "Suspended InGaAs membrane waveguide devices with subwavelength gratings and photonic crystal structures for ammonia sensing at λ=6.15μm (Conference Presentation)", Proc. SPIE 11276, Optical Components and Materials XVII, 1127610 (10 March 2020); https://doi.org/10.1117/12.2546430

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