Combined MEMS spectrometer based on Michelson interferometer and tunable filter for wideband selective operation

Amir K. Shaheen; Yasser M. Sabry; Diaa A. Khalil

doi:10.1117/12.2542938

28 February 2020 Combined MEMS spectrometer based on Michelson interferometer and tunable filter for wideband selective operation

Amir K. Shaheen, Yasser M. Sabry, Diaa A. Khalil

Author Affiliations +

Proceedings Volume 11293, MOEMS and Miniaturized Systems XIX; 112930K (2020) https://doi.org/10.1117/12.2542938
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

In this work we report on combining MEMS Michelson interferometer core engine cascaded with a low finesse Fabry-Perot (FP) tunable filter to enhance the spectral resolution over a wide spectral range. In this scheme, the different FP longitudinal modes within the FTIR spectrometer range are utilized simultaneously to scan the spectrum of the measured material by tuning the filter, while the FTIR engine discriminates between the contributions of the different FP modes; given that the spectral resolution of the FTIR engine is smaller than the FSR of the FP. The presented scheme is implemented experimentally using a FP cavity which is finely tuned using piezo actuator, with a scanning MEMS Michelson interferometer achieving a resolution of 16 nm at 1550 nm. The system is used to resolve two laser lines at 1548 nm and 1552 nm achieving a resolution of 4 nm at 1550 nm leading to four times enhancement. We also measured the absorption lines of a references material in the wavelength range of 1450 nm to 1750 nm and compared it to the measurement of a bench top spectrometer and the two results are in close agreement

Conference Presentation

Citation Download Citation

Amir K. Shaheen, Yasser M. Sabry, and Diaa A. Khalil "Combined MEMS spectrometer based on Michelson interferometer and tunable filter for wideband selective operation", Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 112930K (28 February 2020); https://doi.org/10.1117/12.2542938

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