Power supplies dedicated to the efficient control of the excimer lamps power

H. Piquet; R. Diez; V. Rueda

doi:10.1117/12.2547460

11 December 2019 Power supplies dedicated to the efficient control of the excimer lamps power

H. Piquet, R. Diez, V. Rueda

Proceedings Volume 11322, XIV International Conference on Pulsed Lasers and Laser Applications; 1132203 (2019) https://doi.org/10.1117/12.2547460
Event: XIV International Conference on Pulsed Lasers and Laser Applications (AMPL-2019), 2019, Tomsk, Russian Federation

Abstract

Excimer lamps take place among the numerous industrial applications which rely on cold plasmas generated by means of Dielectric Barrier Discharges. For the performance and reliability of these applications, the control of the electrical energy injected into the plasma is of prominent importance; it also contributes to the homogeneity of the electrical discharge and to the amount of created excited species, thus the UV emission. In this scope, we have developed generations of pulsed current power supplies aimed at controlling the energy of the injected pulses. For UV generation processes by means of excimer lamps, the design approach of two of the most performing topologies is presented. The performances are highlighted, as well as the pitfalls and solutions for their use. The critical impact of the high voltage transformer, through its parasitic parameters, is pointed out, as well as solutions trying to take advantage of them.

Citation Download Citation

H. Piquet, R. Diez, and V. Rueda "Power supplies dedicated to the efficient control of the excimer lamps power", Proc. SPIE 11322, XIV International Conference on Pulsed Lasers and Laser Applications, 1132203 (11 December 2019); https://doi.org/10.1117/12.2547460

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