Compact high-stability and low-nonlinearity heterodyne grating interferometer

Cunbao Lin; Yurong Liao; Zhaoming Li; Dan Ding

doi:10.1117/12.2541950

12 March 2020 Compact high-stability and low-nonlinearity heterodyne grating interferometer

Cunbao Lin, Yurong Liao, Zhaoming Li, Dan Ding

Proceedings Volume 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 114390E (2020) https://doi.org/10.1117/12.2541950
Event: 2019 International Conference on Optical Instruments and Technology, 2019, Beijing, China

Abstract

A heterodyne grating interferometer (HGI) with high stability and low nonlinearity is presented. An optical arrangement with Littrow configuration combined with Wollaston prism is proposed for the HGI. The compact and symmetrical design make it insensitive to environmental disturbances. The optimal separate angle of the Wollaston prism is investigated with rigorous coupled-wave analysis (RCWA), and the value of 44° corresponding to the grating pitch of 845 nm is selected. The approximately equal diffraction efficiencies of 76.54% and 76.64% for TE and TM polarizations are respectively obtained, which is beneficial to the signal-to-noise ratio (SNR) of HGI. Additionally, the nonlinear errors including polarization mixing, frequency mixing and polarization-frequency mixing are analyzed. The polarization mixing error is dramatically decreased owing to the high extinction ratio of Wollaston prism. It reveals that the developed HGI has the potential for nanometric displacement measurement.

Citation Download Citation

Cunbao Lin, Yurong Liao, Zhaoming Li, and Dan Ding "Compact high-stability and low-nonlinearity heterodyne grating interferometer", Proc. SPIE 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 114390E (12 March 2020); https://doi.org/10.1117/12.2541950

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KEYWORDS

Polarization

Diffraction gratings

Diffraction

Optical design

Error analysis

Interferometers

Prisms

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