On the metrology and analysis of MSF error

Olga Kukso; Rolf Rascher; Mario Pohl; Rainer Boerret

doi:10.1117/12.2566251

8 July 2020 On the metrology and analysis of MSF error

Olga Kukso, Rolf Rascher, Mario Pohl, Rainer Boerret

Proceedings Volume 11478, Seventh European Seminar on Precision Optics Manufacturing; 1147809 (2020) https://doi.org/10.1117/12.2566251
Event: Seventh European Seminar on Precision Optics Manufacturing, 2020, Teisnach, Germany

Abstract

The aim of our research was to study middle spatial frequency errors (MSFE) on optical surfaces. We investigate the surfaces after manufacturing processes to find out the main affecting factors and to choose the proper processing parameters to minimize the size of the errors. To find an appropriate parameter window we have to be able not only to define the factors, which lead to MSFE, but also to analyze the change of the error after next following production steps.

Citation Download Citation

Olga Kukso, Rolf Rascher, Mario Pohl, and Rainer Boerret "On the metrology and analysis of MSF error", Proc. SPIE 11478, Seventh European Seminar on Precision Optics Manufacturing, 1147809 (8 July 2020); https://doi.org/10.1117/12.2566251

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