Fourier optics modelling of instrument response for interference microscopy

Peter de Groot; Xavier Colonna de Lega

doi:10.1117/12.2569391

21 August 2020 Fourier optics modelling of instrument response for interference microscopy

Proceedings Volume 11490, Interferometry XX; 114900T (2020) https://doi.org/10.1117/12.2569391
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

Interferometers for the measurement of topography rely on imaging systems to map surface points to a camera. The response of an interferometer to variations in surface height depends on the filtering properties of the imaging system. Here we provide a simple and practical model of an imaging interferometer using classical Fourier optics, including the effects of partial coherence. The model is useful for understanding basic properties such as lateral resolution and error sources related to measurement principles that make assumptions regarding the fidelity of the instrument response over a range of surface spatial frequencies and light source wavelengths.

Conference Presentation

Citation Download Citation

Peter de Groot and Xavier Colonna de Lega "Fourier optics modelling of instrument response for interference microscopy", Proc. SPIE 11490, Interferometry XX, 114900T (21 August 2020); https://doi.org/10.1117/12.2569391

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