Approach for finding amplitudes of the transmitted diffraction orders in the framework of a rigorous coupled-wave analysis and its application in the study of three-layer sawtooth microstructures

A. I. Antonov; G. I. Greisukh

doi:10.1117/12.2572287

10 October 2020 Approach for finding amplitudes of the transmitted diffraction orders in the framework of a rigorous coupled-wave analysis and its application in the study of three-layer sawtooth microstructures

A. I. Antonov, G. I. Greisukh

Author Affiliations +

Proceedings Volume 11551, Holography, Diffractive Optics, and Applications X; 115511C (2020) https://doi.org/10.1117/12.2572287
Event: SPIE/COS Photonics Asia, 2020, Online Only

Conference Poster

Abstract

Based on a complete system of boundary conditions for an electromagnetic field incident on a periodic structure, an algorithm is presented that allows you to convert such a system, leaving only the unknown amplitudes of the transmitted diffraction orders. The method underlying the algorithm belongs to the family of Fourier-space methods so devices and fields are represented as a sum of spatial harmonics. It is shown that the results of calculating the diffraction efficiency obtained using this approach completely coincide with the results obtained in the framework of the enhanced transmittance matrix approach and the scattering matrix approach. The dependences of diffraction efficiency on the wavelength and angle of incidence of the microstructure obtained by this method are presented. These results are consistent with the conclusions made in earlier studies, based on a different approach in the framework of a rigorous coupled-wave analysis.

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A. I. Antonov and G. I. Greisukh "Approach for finding amplitudes of the transmitted diffraction orders in the framework of a rigorous coupled-wave analysis and its application in the study of three-layer sawtooth microstructures", Proc. SPIE 11551, Holography, Diffractive Optics, and Applications X, 115511C (10 October 2020); https://doi.org/10.1117/12.2572287

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