Large departure off-axis aspheric mirror testing with computer generated holograms and non-contact profile

Zhaoming Wang; Mengjuan Li; Siyu Chen; Lingdi Xu; Wen Guo; Yonggang Wang; Yuming Zhou; Jiyou Zhang

doi:10.1117/12.2580081

5 November 2020 Large departure off-axis aspheric mirror testing with computer generated holograms and non-contact profile

Zhaoming Wang, Mengjuan Li, Siyu Chen, Lingdi Xu, Wen Guo, Yonggang Wang, Yuming Zhou, Jiyou Zhang

Author Affiliations +

Proceedings Volume 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing; 115681G (2020) https://doi.org/10.1117/12.2580081
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China

Abstract

A computer-generated hologram(CGH) was designed and produced for precisely testing the off-axis aspheric mirror with departure of 1200um in a three mirror astigmatism optical system．To solve the problem of selection of incident light position in CGH design Depended on engineering experience was likely to increase spatial frequency of CGH which reduced testing accuracy of aspheric mirror. A CGH design method was proposed based on quantitative calculation of incident light position which reduced the reliance on experience. The testing result by CGH was compared with that of non-contact profile testing method when the off-axis aspheric mirror surface was polished to 0.05λ（RMS）.Two testing results show a good agreement. By CGH testing method，the surface error is 0.016λ RMS now．

Citation Download Citation

Zhaoming Wang, Mengjuan Li, Siyu Chen, Lingdi Xu, Wen Guo, Yonggang Wang, Yuming Zhou, and Jiyou Zhang "Large departure off-axis aspheric mirror testing with computer generated holograms and non-contact profile", Proc. SPIE 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing, 115681G (5 November 2020); https://doi.org/10.1117/12.2580081

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