Linear And Rotary Encoders Using Electronic Speckle Correlation

Ichirou Yamaguchi; Tadashige Fujita

doi:10.1117/12.962748

25 April 1990 Linear And Rotary Encoders Using Electronic Speckle Correlation

Ichirou Yamaguchi, Tadashige Fujita

Proceedings Volume 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series; (1990) https://doi.org/10.1117/12.962748
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Speckle patterns can be used as natural surface markings which are printed by high coherence of laser light. Speckle displacement caused by linear or rotary motion of a surface is detected with a linear image sensor whose outputs are analyzed by a correlator. By using an image sensor of the pitch 15 pm and 1024 elements, resolution of a micrometer and 1/1000° have been attained. Main advantages of the encoders are extreme simplicity in optical configurations and wide ranges of measurement.

Citation Download Citation

Ichirou Yamaguchi and Tadashige Fujita "Linear And Rotary Encoders Using Electronic Speckle Correlation", Proc. SPIE 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series, (25 April 1990); https://doi.org/10.1117/12.962748

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