Paper
20 November 1989 Sinusoidal Phase Modulating Laser Diode Interferometer With Feedback Control System To Eliminate External Disturbance
Osami Sasaki, Kazuhide Takahashi, Takarnasa Suzuki
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Abstract
We propose a sinusoidal phase modulating laser diode interferometer which is insensitivity to vibrations of optical devices and fluctuations in the optical wavelength of the laser diode. We analyze the sinusoidal phase modulation in a laser diode interferometer, and describe the principle of the feedback control of the injection current of the laser diode to eliminate the fluctuations in the phase of the interference signal caused by external disturbances. We construct two sinusoidal phase modulating interferometers for movement measurements and surface profile measurements, respectively. The experimental results make it clear that the interferometers can be used in mechanically noisy circumstances.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Osami Sasaki, Kazuhide Takahashi, and Takarnasa Suzuki "Sinusoidal Phase Modulating Laser Diode Interferometer With Feedback Control System To Eliminate External Disturbance", Proc. SPIE 1163, Fringe Pattern Analysis, (20 November 1989); https://doi.org/10.1117/12.962776
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Cited by 2 scholarly publications.
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KEYWORDS
Interferometers

Feedback control

Semiconductor lasers

Modulation

Phase shift keying

Phase measurement

Scanning probe microscopy

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