Radial Metrology With A Panoramic Annular Lens

Donald R. Matthys; Pal Greguss; John A. Gilbert; David L. Lehner; Amy S. Kransteuber

doi:10.1117/12.962820

20 December 1989 Radial Metrology With A Panoramic Annular Lens

Donald R. Matthys, Pal Greguss, John A. Gilbert, David L. Lehner, Amy S. Kransteuber

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962820
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

In the present paper, cavity shapes are profiled using two opposing collinear panoramic annular lenses. A speckle pattern is projected out from one panoramic annular lens onto a reference stan d or onto lle cavity wall itself, and the resulting speckle distribution is recorded through e second panoramic annular lens. Since the speckle pattern moves as the shape of the cavity changes, H e variation in cavity shape can be measured by applying correlation techniques to the speckle patterns obtained before and after the cavity shape is modified. The apparent speckle movement is computed by numerically correlating small subsets extracted from each pattern. These shifts are used to measure surface deflections or to contour the cavity with respect to a reference shape.

Citation Download Citation

Donald R. Matthys, Pal Greguss, John A. Gilbert, David L. Lehner, and Amy S. Kransteuber "Radial Metrology With A Panoramic Annular Lens", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962820

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