Vertical Profiling, CD Measurements, And 3D Surface Profiling With A Confocal Laser Scanning Microscope

Tom Pommso; D. Awamura; T. Ode

doi:10.1117/12.962823

20 December 1989 Vertical Profiling, CD Measurements, And 3D Surface Profiling With A Confocal Laser Scanning Microscope

Tom Pommso, D. Awamura, T. Ode

Author Affiliations +

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962823
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

confocal Laser Scanning Microscope has been developed which has many advantages over conventional microscopes in many different applications including small spot profilometry, CD measuring and 3D surface profiling.

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Tom Pommso, D. Awamura, and T. Ode "Vertical Profiling, CD Measurements, And 3D Surface Profiling With A Confocal Laser Scanning Microscope", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962823

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