An auto-focusing reflection-type lens-less digital holographic microscope

Zhuoshi Li; Chao Zuo; Qian Chen

doi:10.1117/12.2587376

15 January 2021 An auto-focusing reflection-type lens-less digital holographic microscope

Zhuoshi Li, Chao Zuo, Qian Chen

Proceedings Volume 11761, Fourth International Conference on Photonics and Optical Engineering; 117611I (2021) https://doi.org/10.1117/12.2587376
Event: Fourth International Conference on Photonics and Optical Engineering, 2020, Xi'an, China

Abstract

This paper introduces an auto-focusing reflection-type lens-less digital holography microscopic system, which has the characteristics of wide field of view, high precision and miniaturization. It can quickly and accurately carry out three-dimensional (3D) reconstruction and quantitative measurement of small devices with reflective surfaces. The system uses 632.8nm laser illumination. After coherent imaging, the hologram is collected by a board-level camera, and digital holography technology is used for phase recovery and 3D reconstruction. At the same time, the compact design of the system and the use of the board-level camera have reduced the overall size to only: 68mmx43mmx38mm. Its auto-focusing function has better focus accuracy and recovery quality than traditional manual adjustment. In addition, we experimented with a miniaturized chip which is micrometers in size, reconstructed its 3D shape, and gave the effect of auto-focusing experiment.

Citation Download Citation

Zhuoshi Li, Chao Zuo, and Qian Chen "An auto-focusing reflection-type lens-less digital holographic microscope", Proc. SPIE 11761, Fourth International Conference on Photonics and Optical Engineering, 117611I (15 January 2021); https://doi.org/10.1117/12.2587376

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