Parametric study of multi-focal laser processing using an ultrafast tunable acoustic lens

Xiaohan Du; Camilo Florian; Craig B. Arnold

doi:10.1117/12.2607973

4 March 2022 Parametric study of multi-focal laser processing using an ultrafast tunable acoustic lens

Xiaohan Du, Camilo Florian, Craig B. Arnold

Proceedings Volume 11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII; 119880D (2022) https://doi.org/10.1117/12.2607973
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

Multi-focal beam shaping can enhance laser processing throughput by increasing the number of processing sites and lowering processing time. This paper implements multi-focal beam shaping by adopting a tunable acoustic gradient of index (TAG) lens, which scans the focal position in the axial direction at 140 kHz. When the laser is synced with the corresponding phases of the TAG lens, multiple focal spots can be selected, allowing for ultrafast and flexible multi-focal modulation without physically moving any optics. We further characterize the tuning parameters of the TAG lens, such as its frequency, amplitude, and phase, and demonstrate the dual-focal marking on both sides of a glass slide in a single lateral scan.

Conference Presentation

Citation Download Citation

Xiaohan Du, Camilo Florian, and Craig B. Arnold "Parametric study of multi-focal laser processing using an ultrafast tunable acoustic lens", Proc. SPIE 11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, 119880D (4 March 2022); https://doi.org/10.1117/12.2607973

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