Simulation analysis on the design of the PZT stacked array deformable mirror

Xuemin Cheng; Jindong Wang; Yao Hu; Qun Hao

doi:10.1117/12.2612138

19 November 2021 Simulation analysis on the design of the PZT stacked array deformable mirror

Xuemin Cheng, Jindong Wang, Yao Hu, Qun Hao

Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120591A (2021) https://doi.org/10.1117/12.2612138
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China

Abstract

The influence function of the actuators can be expressed as a Gaussian function. The exponent of the Gaussian function influences the reconstruction precision of the deformable mirror (DM). A finite element model of the PZT stacked array DM with 55 actuators was created, and each actuator was separately controlled. The influence of the structural parameters of the DM on the Gaussian index and coupling coefficient was investigated. Based on the simulation results, the design of the DM was optimized. In addition, using simulation, the fatigue life and working bandwidth of the new model were studied. Specific aberration surfaces were reconstructed. The results showed that the optimized DM had a smaller reconstruction error compared with the pre-optimized model. This study can be used as a reference for the design of DMs.

Citation Download Citation

Xuemin Cheng, Jindong Wang, Yao Hu, and Qun Hao "Simulation analysis on the design of the PZT stacked array deformable mirror", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120591A (19 November 2021); https://doi.org/10.1117/12.2612138

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KEYWORDS

Actuators

Mirrors

Finite element methods

Ferroelectric materials

Deformable mirrors

Wavefronts

Monochromatic aberrations

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