Adaptive sinusoidal signal processing techniques for interferometers

Xin Li; Wen-Kai Zhao; Rui‐Jun Li

doi:10.1117/12.2613427

19 November 2021 Adaptive sinusoidal signal processing techniques for interferometers

Xin Li, Wen-Kai Zhao, Rui‐Jun Li

Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120591O (2021) https://doi.org/10.1117/12.2613427
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China

Abstract

The precision and accuracy of interferometres are limited by three typical errors, including phase shift errors, gain differences, and zero offset. A sinusoidal signal processing techniques for interferometers to correct the errors is proposed in this paper. The errors are compensated by the orthogonalized circuits based on vector operations, the regularized circuits based on automatic gain control (AGC) technology and the DC offset compensation circuits based on low-pass filter, respectively. Miniature semiconductor polarization Michelson interferometer system has been developed using the proposed sinusoidal signal processing techniques and compared with the SIOS commercial interferometer. Experimental results show that the errors can be compensated effectively, and the measuring standard deviation of the developed interferometer is 57 nm. The proposed system can be used to correct the typical errors in sinusoidal signal processing fields.

Citation Download Citation

Xin Li, Wen-Kai Zhao, and Rui‐Jun Li "Adaptive sinusoidal signal processing techniques for interferometers", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120591O (19 November 2021); https://doi.org/10.1117/12.2613427

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