Modeling and analysis of surface roughness in fused silica by CO2 laser smoothing

Xinyu Luo; Wei Yang; Yaguo Li

doi:10.1117/12.2603935

13 December 2021 Modeling and analysis of surface roughness in fused silica by CO₂ laser smoothing

Xinyu Luo, Wei Yang, Yaguo Li

Proceedings Volume 12073, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies; 120730C (2021) https://doi.org/10.1117/12.2603935
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

The research of CO₂ laser smoothing fused silica to achieve smooth surface was investigated by simulations and experiments. Micro-flow smoothing of fused silica was numerically simulated. In the experiments, the influence of processing parameters, such as P (laser power), v (scanning velocity) and d (scanning path pitch) were taken into account on surface roughness (Ra) after laser irradiation. The results show that the roughness is rapidly reduced from 183.6nm to 14.27nm under P=35W, v=0.2mm/s, d=1.0mm, and thus the smooth surface is obtained. On the other hand, the raster structure will appear on the surface at inappropriate parameters (P=30W or v=0.5mm/s or d=2.0mm). The surface roughness highly influenced by raster structure ranges from ~40nm to ~140nm, 140.9nm for P=30W, 71.6nm for v=0.5mm/s, 41.3nm for d=2.0mm.

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Xinyu Luo, Wei Yang, and Yaguo Li "Modeling and analysis of surface roughness in fused silica by CO₂ laser smoothing", Proc. SPIE 12073, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies, 120730C (13 December 2021); https://doi.org/10.1117/12.2603935

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KEYWORDS

Silica

Gas lasers

Surface roughness

Carbon monoxide

Raster graphics

Optical simulations

Carbon dioxide lasers

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