Harmonic frequency estimation method in multi-surface interferometry

Lin Chang; Tingting He; Yingjie Yu

doi:10.1117/12.2617058

15 February 2022 Harmonic frequency estimation method in multi-surface interferometry

Lin Chang, Tingting He, Yingjie Yu

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121663X (2022) https://doi.org/10.1117/12.2617058
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

The surface morphologies and thickness variation are the basic characteristics of a transparent parallel plate with multiple surfaces. Measurements of these profiles are greatly significant for the evaluation of surface quality. The measurement accuracy of phase-shifting interferometry can reach the nanometer level, which is an effective method for high-precision measurements of ultra-smooth surfaces. However, each measured surface will give its own harmonic to the captured interferograms, resulting in the information of harmonics mixed. Thus the surface topology information can not be detected directly, which can cause problems of the wavefront reconstruction of the measured surface. To solve this problem, separating the mixed harmonics is necessary. The fundamental difference in harmonics lies in their frequency. Therefore, determining these differences of harmonics by frequency is a preliminary method of phase demodulation.

Citation Download Citation

Lin Chang, Tingting He, and Yingjie Yu "Harmonic frequency estimation method in multi-surface interferometry", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121663X (15 February 2022); https://doi.org/10.1117/12.2617058

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KEYWORDS

Interferometry

Algorithm development

Phase shifts

Error analysis

Reconstruction algorithms

Autoregressive models

Demodulation

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