The ALS interferometric microscope upgraded for measurements with large x-ray optics and optical assemblies

Ian Lacey; Kevan Anderson; Harold Barnard; Damon English; Wayne R. McKinney; Muhammad A. Saeed; Valeriy V. Yashchuk

doi:10.1117/12.2633103

4 October 2022 The ALS interferometric microscope upgraded for measurements with large x-ray optics and optical assemblies

Ian Lacey, Kevan Anderson, Harold Barnard, Damon English, Wayne R. McKinney, Muhammad A. Saeed, Valeriy V. Yashchuk

Author Affiliations +

Proceedings Volume 12240, Advances in X-Ray/EUV Optics and Components XVII; 122400C (2022) https://doi.org/10.1117/12.2633103
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

We describe details of a recent deep upgrade of the MicroMap-570 interferometric microscope available at the Advanced Light Source X-Ray Optics Laboratory. The upgrade has included an improvement of the microscope optical sensor and data acquisition software, design and implementation of automated optic alignment and microscope translation systems, and development of a specialized software for data processing in the spatial frequency domain. With the upgraded microscope, we are now capable for automated (remoted) measurements with large x-ray optics and optical systems. The results of experimental evaluation of the upgraded microscope performance and calibration of its instrument transfer function are also discussed. Because the same already obsolete MicroMap-570 microscopes have been used for years at other metrology laboratories at the x-ray facilities around the globe, we believe that our experience on upgrade of the microscope describe in detail in the present paper is broadly interesting and useful.

Conference Presentation

Citation Download Citation

Ian Lacey, Kevan Anderson, Harold Barnard, Damon English, Wayne R. McKinney, Muhammad A. Saeed, and Valeriy V. Yashchuk "The ALS interferometric microscope upgraded for measurements with large x-ray optics and optical assemblies", Proc. SPIE 12240, Advances in X-Ray/EUV Optics and Components XVII, 122400C (4 October 2022); https://doi.org/10.1117/12.2633103

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