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In industrial sites, large-scale advanced manufacturing equipment such as optical diamond cutting lathes require stable operation during processing and are very sensitive to operating speed. However, the vibration generated by the environment or equipment will interfere with its operation and machining accuracy. A precise laser interference measurement system is required to monitor the running speed and position of the three-axis tool of the lathe in real time, providing accurate parameters for the closed-loop control system of the equipment, and improving the stability of lathe operation. Frequency-modulated continuous-wave (FMCW) lidar is widely used in the field of industrial measurement due to its non-contact, high accuracy, and fast dynamic response. The basic principle of FMCW lidars is to measure the velocity of a moving object through the Doppler frequency shift phenomenon. But the vibration generated by the moving object will cause the spectrum to broaden and the precision and repeatability of measurement to decrease. Therefore, we propose a large-bandwidth triangular wave-modulated lidar structure with Fabry-Pérot(F-P) cavity to achieve real-time high-precision measurement of the speed and distance of moving targets. This structure is based on the F–P resonance peaks generated by changing the length of the F-P cavity to accurately split the beat signal generated in the sweep frequency range of 1545-1565nm to obtain 40 sets of data with equal frequency intervals of 62GHz, effectively solve the problem of excessive data volume when measuring the continuous moving target speed and reduces the complexity of the algorithm. Splitting the measured beat signal based on the resonance peaks signal of the F-P cavity, which reduces the phase delay of the beat signal corresponding to the up- and down-scanning, thus reducing the signal spectrum broadening caused by frequency deviation and nonlinear, and increasing the target measurement resolution, accuracy and range. The experimental results show that for speeds of up to 250mm/s, the mean standard deviation was less than 152μm/s, the mean error was less than 183μm/s, the relative error of the mean value of speed measurement does not exceed 0.22%, and the standard deviation of the distance measurement results within a range of 4m under various speed conditions does not exceed 17μm, the error does not exceed 14μm, it has good accuracy and repeatability for the speed and distance measurement. The lidar architecture solution we proposed has important application value for large-scale industrial equipment measurement and operation monitoring.
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