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The work is devoted to the analysis of the accuracy characteristics of rotation angle sensors using angular scales from nanostructured metasurfaces. The principle of their operation is based on the dependence of the frequency response of metasurfaces on the orientation of the incident light polarization plane. The influence of the noise characteristic of angle sensors on the measurement result is considered. It is shown that for the sensors considered in the work, it might be on the order of units of arc seconds. The influence on the accuracy characteristics of misalignments of the angular scale and thermal effects that the sensor may experience during operation is analyzed. Recommendations to reduce the influence of parasitic effects and further improve the accuracy characteristics are given.
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U. V. Prokhorova, E. V. Shalymov, V. I. Shoev, V. Yu. Venediktov, A. S. Kukaev, "Analysis of factors affecting the accuracy of the rotation angle measurement using nanostructured metasurfaces," Proc. SPIE 12321, Advanced Sensor Systems and Applications XII, 123210C (19 December 2022); https://doi.org/10.1117/12.2642137