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Based on the theoretical analysis and investigation of the infrared absorption spectra of two SF6 characteristic decomposition products, SO2F2 and SOF2, an experimental system of the influence of temperature and pressure is constructed, and the influence characteristics of temperature and pressure on the absorption spectra are measured. Through theoretical analysis and experiments, the best mid infrared laser spectrum detection technology is compared and studied; investigated and experimentally studied the low adsorption materials suitable for gas pool; the optical gas absorption cell and photoacoustic gas cell are designed and simulated; the mid infrared inter band cascade laser and quantum cascade laser were purchased, and the tuning characteristics of the laser were analyzed. The experimental platform of TDLAS laser spectrum measurement and photoacoustic spectrum are built. The experimental research on SO2F2 and SOF2 in the alternative wave band is carried out, and good measurement results are obtained. The photoacoustic gas cell and some electronic control modules of the device are developed. Based on the laser light transmission theory, this paper deeply studies and analyzes the theory of long-range multiple reflection gas absorption cell used in TDLAS system, simulates and designs Herriott multiple reflection gas absorption cell with the help of TracePro ray tracing software, and obtains the design parameters of high stability multiple reflection long-range gas cell. Using the multi physical field finite element simulation software, the thermal viscous acoustic theory simulation of the photoacoustic cell required for photoacoustic spectroscopy technology is studied. Two photoacoustic cells are designed, and the resonance conditions, intrinsic oscillation frequency, sound pressure, temperature and other parameters are obtained. The above theoretical and simulation research on the gas pool provides important parameter guarantee for the development of the device.
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