Designing and optimizing method of SAW force sensor based on oneport resonator

Junbai Xiao; Guanyuxing Cheng; Yongtao Yuan; Dingyu Feng; Yuntao Cheng

doi:10.1117/12.2652904

2 November 2022 Designing and optimizing method of SAW force sensor based on oneport resonator

Junbai Xiao, Guanyuxing Cheng, Yongtao Yuan, Dingyu Feng, Yuntao Cheng

Proceedings Volume 12351, International Conference on Advanced Sensing and Smart Manufacturing (ASSM 2022); 1235110 (2022) https://doi.org/10.1117/12.2652904
Event: International Conference on Advanced Sensing and Smart Manufacturing (ASSM 2022), 2022, Nanjing, China

Abstract

In this paper, a simple and effective method was demonstrated for designing and optimizing the surface acoustic wave (SAW) force sensor with one-port resonators. Interestingly, via combining the empirical formula and the coupling of modes (COM), initial range of the essential structural parameters (i.e., the interdigital transducer pairs, the reflection grating pairs, the acoustic aperture and the film thickness) were confirmed. As such, the final parameters were obtained by using orthogonal tests and the analysis of comprehensive factors. Furthermore, the finite element simulations showed that our designed SAW force sensor exhibited a good negative linear relationship between the loads and the center frequencies. This study may provide an efficient and potential designing strategy for the practical SAW force sensors.

Citation Download Citation

Junbai Xiao, Guanyuxing Cheng, Yongtao Yuan, Dingyu Feng, and Yuntao Cheng "Designing and optimizing method of SAW force sensor based on oneport resonator", Proc. SPIE 12351, International Conference on Advanced Sensing and Smart Manufacturing (ASSM 2022), 1235110 (2 November 2022); https://doi.org/10.1117/12.2652904

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available