Ultra-high-Q-factor racetrack resonators on thick SOI platform through sidewall roughness improvement by hydrogen annealing

Yisbel Marin; Arijit Bera; Matteo Cherchi; Timo Aalto

doi:10.1117/12.2650143

15 March 2023 Ultra-high-Q-factor racetrack resonators on thick SOI platform through sidewall roughness improvement by hydrogen annealing

Yisbel Marin, Arijit Bera, Matteo Cherchi, Timo Aalto

Author Affiliations +

Proceedings Volume 12407, Laser Resonators, Microresonators, and Beam Control XXV; 1240704 (2023) https://doi.org/10.1117/12.2650143
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

We designed and experimentally demonstrated racetrack resonators on a 3 μm thick SOI platform with intrinsic quality factors above 10 million. The racetrack configuration consists of a combination of straight sections based on rib waveguides and bend sections based on strip waveguides following a so-called Euler curve to achieve a compact footprint. The ultra-high-Q factors were achieved through a significant sidewall roughness reduction by controlled annealing in a hydrogen atmosphere, allowing to achieve propagation losses for 3 μm wide rib waveguides down to ~3 dB/m. The process potentially enables emerging PIC applications demanding ultra-low propagation losses.

Conference Presentation

Citation Download Citation

Yisbel Marin, Arijit Bera, Matteo Cherchi, and Timo Aalto "Ultra-high-Q-factor racetrack resonators on thick SOI platform through sidewall roughness improvement by hydrogen annealing", Proc. SPIE 12407, Laser Resonators, Microresonators, and Beam Control XXV, 1240704 (15 March 2023); https://doi.org/10.1117/12.2650143

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