A high precision transverse distortion measurement based on interference fringe pattern analysis

Jianxiang Du; Xiaoying Zong; Yiran Zhang

doi:10.1117/12.2642448

20 January 2023 A high precision transverse distortion measurement based on interference fringe pattern analysis

Jianxiang Du, Xiaoying Zong, Yiran Zhang

Proceedings Volume 12559, AOPC 2022: Novel Optical Design; and Optics Ultra Precision Manufacturing and Testing; 1255902 (2023) https://doi.org/10.1117/12.2642448
Event: Applied Optics and Photonics China 2022 (AOPC2022), 2022, Beijing, China

Abstract

The mechanical structure of space remote sensor with large pupil would be distorted on ground because of the gravity. The distortion would directly affect the sensor performance. According to this demand, a high precision measurement of distortion is presented in this article. It is based on the theory of interference. Tow mirrors are placed on the positions according to the measurement requirement. One is the reference mirror and the other is to measure the movement. They are all spherical mirrors, and are aligned with a common center. A spherical wave is centered with them an reflected by the mirrors, when the distortion occurs, position of the two mirrors is changed, so does the fringe of the interference. The mathematical equation between distortion and fringe changing is presented. The precision can be less than 1μm.

Citation Download Citation

Jianxiang Du, Xiaoying Zong, and Yiran Zhang "A high precision transverse distortion measurement based on interference fringe pattern analysis", Proc. SPIE 12559, AOPC 2022: Novel Optical Design; and Optics Ultra Precision Manufacturing and Testing, 1255902 (20 January 2023); https://doi.org/10.1117/12.2642448

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KEYWORDS

Mirrors

Wavefronts

Spherical lenses

Distortion

Interferometers

Fringe analysis

Interferometry

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