Paper
12 April 2023 Research on polarizing properties of integrated double-layer subwavelength grating in mid-wave infrared
Xinchang Pan, Ruiting Hao, Jie Guo, Jing Zhou, Yang Ren, Junbin Li, Jincheng Kong
Author Affiliations +
Proceedings Volume 12565, Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022); 125652O (2023) https://doi.org/10.1117/12.2662707
Event: Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022), 2022, Shanghai, China
Abstract
Integrated polarization focal plane detection imaging has the advantages of small size, high system integration, high mechanical stability and real-time polarization imaging in multiple polarization directions. We have developed a simulation model for back-illuminated mid-wave InAs/GaSb Type-II superlattices (T2SLs) infrared focal plane arrays (FPAs) on-chip integrated polarization grating. The polarization grating is an Al-ZnS double-layer subwavelength grating with antireflection coating, which has a better polarization transmission than a single-layer Al grating with the same deep slot. The effect of different grating parameters on the detector is simulated and optimized by the finite-difference time-domain (FDTD) method, and the results obtained are qualitatively interpreted in a physical sense by the Fabry-Perot-like (F-P-like) resonance theory. The optimized grating has a TM polarization transmittance higher than 92% and extinction ratios greater than 32 dB for wavelengths from 3-5 μm, and is suitable for infrared polarization imaging in the 0°-50° field-of-view range. The simulation results can provide theoretical basis and guidance for the design of polarization gratings for mid-infrared monolithic integrated polarization InAs/GaSb T2SLs FPAs.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xinchang Pan, Ruiting Hao, Jie Guo, Jing Zhou, Yang Ren, Junbin Li, and Jincheng Kong "Research on polarizing properties of integrated double-layer subwavelength grating in mid-wave infrared", Proc. SPIE 12565, Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022), 125652O (12 April 2023); https://doi.org/10.1117/12.2662707
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KEYWORDS
Polarization

Transmittance

Dielectric polarization

Zinc

Aluminum

Mid-IR

Infrared radiation

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