NIL master manufacturing for optical gratings

Matthias Nestler; Marcel Demmler; Manuela Lötsch; Karl Gündel

doi:10.1117/12.2665773

31 May 2023 NIL master manufacturing for optical gratings

Matthias Nestler, Marcel Demmler, Manuela Lötsch, Karl Gündel

Proceedings Volume 12575, Integrated Optics: Design, Devices, Systems and Applications VII; 1257509 (2023) https://doi.org/10.1117/12.2665773
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic

Abstract

The production of surface relief gratings plays a crucial role in nano-structuring today. Applications range from laser mirrors to manufacturing of waveguides for mixed and augmented reality. Augmented (AR) and mixed reality (MR) applications have recently gained large interest. For in- and out-coupling optics, mainly Slanted Relief Gratings (SRG) are used. Nano-imprint lithography (NIL) is one way to produce such optical gratings.^{[1], [2], [3]} For this procedure, NIL master stamp is pressed into a polymer for replication of the pattern. These NIL master stamps have to be structured previous to the NIL process. The manufacturing of those masters is realized by a pattern transfer of a masked substrate by ion beam etching technology. This technology enables the tilting of the substrate in the respect to the ion beam, the so-called incident angle of the ions, and, hence, the slant angles can be defined. Additionally, applying different process parameters, such as ion energy, beam current density and the mixture of process gas, the ratio between the physical, anisotropic etching and chemical isotropic etching can be adjusted. This ratio defines the shape of the slanted gratings. Two types of ion beam process are available, the Reactive ion beam etching (RIBE) for structuring the complete substrate surface simultaneously and the reactive ion beam trimming (RIBT) a locally resolved etching method enabling manufacturing of slanted gratings with both varying slant angle and varying trench depth. This work shows process results for these two manufacturing approaches.

Conference Presentation

Citation Download Citation

Matthias Nestler, Marcel Demmler, Manuela Lötsch, and Karl Gündel "NIL master manufacturing for optical gratings", Proc. SPIE 12575, Integrated Optics: Design, Devices, Systems and Applications VII, 1257509 (31 May 2023); https://doi.org/10.1117/12.2665773

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available