The multiple array detector optical lever deflection angle metrology for x-ray mirrors, and semiconductor applications

Wojtek J. Walecki

doi:10.1117/12.3000238

3 October 2023 The multiple array detector optical lever deflection angle metrology for x-ray mirrors, and semiconductor applications

Wojtek J. Walecki

Author Affiliations +

Proceedings Volume 12695, Advances in Metrology for X-Ray and EUV Optics X; 1269509 (2023) https://doi.org/10.1117/12.3000238
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

We present concept of the optical level deflection family of angle sensors capable of measuring deflection angle in range 0 – 0.15 rad with repeatability better than 10 nrad, and spot size of the order of 1 mm. The sensor family employs a set modern array detector. We derive an analytical formula describing shot noise level of the sensor and confirm it by numerical simulations. We find that for light beam spot size sufficiently larger than detector pixel size, and much smaller than array the shott noise does not depend on the spot size.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Wojtek J. Walecki "The multiple array detector optical lever deflection angle metrology for x-ray mirrors, and semiconductor applications", Proc. SPIE 12695, Advances in Metrology for X-Ray and EUV Optics X, 1269509 (3 October 2023); https://doi.org/10.1117/12.3000238

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