Influence of manufacturing accuracy on the PIC-based MRR sensors characteristics

Aida G. Zakoyan; Yana V. Aleksakina; Vladislav V. Ivanov; Elizaveta P. Grakhova; Grigory S. Voronkov

doi:10.1117/12.2681194

4 October 2023 Influence of manufacturing accuracy on the PIC-based MRR sensors characteristics

Aida G. Zakoyan, Yana V. Aleksakina, Vladislav V. Ivanov, Elizaveta P. Grakhova, Grigory S. Voronkov

Proceedings Volume 12743, Optical Technologies for Telecommunications 2022; 127430I (2023) https://doi.org/10.1117/12.2681194
Event: Optical Technologies for Telecommunications 2022, 2022, Ufa, Russian Federation

Abstract

This article analyzes the influence of the accuracy of manufacturing microring resonators on the characteristics of sensors based on silicon-on-insulator and silicon nitride platforms of integrated photonics. We estimated a deviation of 8 nm in increasing and decreasing the waveguide width. The results indicate that inaccuracies in the width of the waveguides lead to a resonant shift, but they do not affect the sensor’s sensitivity.

Citation Download Citation

Aida G. Zakoyan, Yana V. Aleksakina, Vladislav V. Ivanov, Elizaveta P. Grakhova, and Grigory S. Voronkov "Influence of manufacturing accuracy on the PIC-based MRR sensors characteristics", Proc. SPIE 12743, Optical Technologies for Telecommunications 2022, 127430I (4 October 2023); https://doi.org/10.1117/12.2681194

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