Preparation and mechanical properties of a-C:H films

Xin Jiang; Klaus Reichelt; Bernd Stritzker

doi:10.1117/12.20516

1 August 1990 Preparation and mechanical properties of a-C:H films

Xin Jiang, Klaus Reichelt, Bernd Stritzker

Proceedings Volume 1275, Hard Materials in Optics; (1990) https://doi.org/10.1117/12.20516
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

Diamondlike a-C:H films have been deposited by decomposition of acetylene. By the combination of Brillouin scattering and the ultralow load indentation technique, the following mechanical properties of the films were studied: the microhardness, H, the Young's modulus, E, the shear modulus, Ii , and the Poisson's ratio, v. From the measured data of mass density, hydrogen concentration and the ratio of sp3/sp2 bonds the f illing factors of these films were calculated. The results show that the hardness,Young's modulus and shear modulus of these films depend stongly on the volume concentration of voids and are directly proportional to the filling factor.

Citation Download Citation

Xin Jiang, Klaus Reichelt, and Bernd Stritzker "Preparation and mechanical properties of a-C:H films", Proc. SPIE 1275, Hard Materials in Optics, (1 August 1990); https://doi.org/10.1117/12.20516

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available