Paper
17 August 2023 Ultra-large FSR filter based on Bragg grating-subwavelength grating slot microring resonator
Hanyue Li, Ruxue Wang, Aimin Wu
Author Affiliations +
Proceedings Volume 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023); 127572H (2023) https://doi.org/10.1117/12.2690170
Event: 3rd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2023), 2023, Kunming, China
Abstract
Microring resonators (MRRs) are widely used in optical filters due to their compact size, high Q, and narrow linewidth. However, traditional MRR-based high sensitivity sensors suffer from narrow free spectral range (FSR), which limits the number of channels for detecting substances and causes interference with the identification of the center wavelength when the refractive index of analytes changes significantly. In this paper, we propose an ultra-large FSR and high sensitivity filter utilizing subwavelength grating slot microring resonator with inner silicon blocks with different widths, achieving FSR of 95.5 nm and refractive index sensitivity of 743 nm/RIU. And a lab-on-chip system comprised of eight channels-based filters is presented, promoting the development of silicon photonics in the detecting resolution of small refractive index changes of analytes to 3.60×10-4 RIU and multiple analytes simultaneously.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hanyue Li, Ruxue Wang, and Aimin Wu "Ultra-large FSR filter based on Bragg grating-subwavelength grating slot microring resonator", Proc. SPIE 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023), 127572H (17 August 2023); https://doi.org/10.1117/12.2690170
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KEYWORDS
Tunable filters

Waveguides

Optical filters

Refractive index

Silicon

Bragg gratings

Microresonators

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