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9 April 2024 High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer
S. Choi, G. Hwang, S. Kheiryzadehkhanghah, I. Choi, W. Chegal, Y. Cho, D. Kim
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Proceedings Volume 12955, Metrology, Inspection, and Process Control XXXVIII; 129550F (2024) https://doi.org/10.1117/12.3010995
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States
Abstract
This paper describes the lateral resolution enhancement of dynamic spectroscopic imaging ellipsometer, aiming to improve its inspection capabilities. Traditional imaging ellipsometers use a rotating optical elements type scheme which typically requires longer acquisition time. Moreover, for spectroscopic applications, an extra spectral scanning mechanism is needed. The proposed system based on a one-piece polarizing interferometric module, can efficiently extract spatio-spectral ellipsometric phase maps of two-dimensional (2D) materials with a spatial resolution of a few microns at a speed of hundreds of Hz.
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S. Choi, G. Hwang, S. Kheiryzadehkhanghah, I. Choi, W. Chegal, Y. Cho, and D. Kim "High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer", Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII, 129550F (9 April 2024); https://doi.org/10.1117/12.3010995
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KEYWORDS
2D materials
Inspection
Imaging systems
Spatial resolution
Visualization
Metrology
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