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This paper proposes three techniques to reduce the time required to calculate single diffraction efficiencies or a series of diffraction efficiencies obtained from rigorous coupled-wave analysis algorithms. These are a technique using the properties of the Toeplitz matrix, a technique for reducing the number of variables in a function of Fourier coefficients, and a technique for using parallel computing. On the example of tasks on plotting the dependences of the diffraction efficiency of two-layer two-relief sawtooth microstructures with antireflection coatings on the angle of incidence of radiation, it is shown that using the properties of Toeplitz matrices can significantly reduce the calculation time. Parallel computing also reduces the calculation time, but it uses more RAM.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
A. I. Antonov,G. I. Greisukh, andE. G. Ezhov
"Techniques for speeding up algorithms for implementing rigorous coupled-wave analysis", Proc. SPIE 12972, International Academic Conference on Optics and Photonics (IACOP 2023), 129720H (25 January 2024); https://doi.org/10.1117/12.3021997
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A. I. Antonov, G. I. Greisukh, E. G. Ezhov, "Techniques for speeding up algorithms for implementing rigorous coupled-wave analysis," Proc. SPIE 12972, International Academic Conference on Optics and Photonics (IACOP 2023), 129720H (25 January 2024); https://doi.org/10.1117/12.3021997