Common-path interferometer using Fresnel zone plate with initial phase shift: metrological uses

Vincente Moreno; Salvador Bara; Dolores Mouriz; Zbigniew Jaroszewicz

doi:10.1117/12.22187

1 July 1990 Common-path interferometer using Fresnel zone plate with initial phase shift: metrological uses

Vincente Moreno, Salvador Bara, Dolores Mouriz, Zbigniew Jaroszewicz

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.22187
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

An improvement in the accuracy of the axial distance measurement between two planes using a simple zone plate interferometer is proposed. In this case a Fresnel zone plate with initial phase shift between the 0th and 1st diffracted orders must be designed. 1. ZONE PLATE INTERFEROMETER. A simple method of measuring angular and axial misalignments between two different planes is possible by using a common-path zone plate /ZP/ interferometer. One plane is associated with a transmission Fresnel ZP being a reference plane whereas the second is connected with a plane mirror directing diffracted beams back to the ZP. When the ZP is illuminated by a plane wave the light passing throughout it is divid ed into several diffraction orders. After freespace propagation they are reflected by a plane mirror and go back to the ZP producing now a new set of diffracted orders for each one of the incidents. With a proper spatial filter system we select only two //O of the output wavefronts in order to observe the interference pattern produced by them. One of these two waves is generated by the virtual focus of the ZP and the other by the real focus. The positions of both focii depends variously on the relative orienta tion and position of the mirror in respect to the ZP plane. The shape and the frequency of'' the fringes in the interferometric pattern give

Citation Download Citation

Vincente Moreno, Salvador Bara, Dolores Mouriz, and Zbigniew Jaroszewicz "Common-path interferometer using Fresnel zone plate with initial phase shift: metrological uses", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.22187

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