High-reflective multilayers as narrowband VUV filters

Muamer Zukic; Douglas G. Torr

doi:10.1117/12.46536

1 September 1991 High-reflective multilayers as narrowband VUV filters

Muamer Zukic, Douglas G. Torr

Proceedings Volume 1485, Reflective and Refractive Optical Materials for Earth and Space Applications; (1991) https://doi.org/10.1117/12.46536
Event: Orlando '91, 1991, Orlando, FL, United States

Abstract

A novel coating has been developed for the 120-230 nm wavelength VUV region which yields significantly higher reflectivity over selectable bandwidths and can be used to fabricate high-performance narrowband reflection filters; the spectral properties of such filters are greatly enhanced through their use in tandem. The coating uses a combination of high and low refractive index dielectric pairs. The proper choice of high-low ratio reduces the effects of VUV absorption for high refractive index films whose extinction coefficient is much higher than for a low-index material.

Citation Download Citation

Muamer Zukic and Douglas G. Torr "High-reflective multilayers as narrowband VUV filters", Proc. SPIE 1485, Reflective and Refractive Optical Materials for Earth and Space Applications, (1 September 1991); https://doi.org/10.1117/12.46536

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